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RBS and SIMS measurements of the fluence dependence of the range distributions of Pb implanted into Si(111) crystals: S Kostic, JJ Jimenez-Rodriguez and DG Armour,Department of Electronic and Electrical Engineering, University of Salford, Salford M5 4WT, UK

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 120 KB
Volume: 34
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(84)90193-3

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