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RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

โœ Scribed by W De Coster; B Brijs; H Bender; J Alay; W Vandervorst


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
900 KB
Volume
45
Category
Article
ISSN
0042-207X

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