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Rare-earth implanted Y2O3 thin films

✍ Scribed by A. Peeva; A.Og. Dikovska; P.A. Atanasov; M. Jiménez de Castro; W. Skorupa


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
336 KB
Volume
253
Category
Article
ISSN
0169-4332

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Y 2 O 3 thin films were grown on silicon (1 0 0) substrates by pulsed-laser deposition at different substrate temperatures and O 2 pressures. The structure and composition of films are studied by using X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The Y 2 O 3 thin films deposit