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Y2O3 thin films: internal stress and microstructure

✍ Scribed by R.J Gaboriaud; F Paumier; F Pailloux; P Guerin

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 363 KB
Volume: 109
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2003.10.023

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