Rare-earth gate oxides for GaAs MOSFET application
โ Scribed by Kwang-Ho Kwon; Jun-Kyu Yang; Hyung-Ho Park; Jongdae Kim; Tae Moon Roh
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 764 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
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## Abstract ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 200 leading journals. To access a ChemInform Abstract, please click on HTML or PDF.
## Abstract The preparation and properties of glass polishing powders composed of the cerium group of rare earth oxides are described. The oxides arc produced by igniting the corresponding hydroxides, milling the product to break up aggregates and elutriating to remove undesirable residues.
Thin films of rare-earth scandates (REScO 3 ) as well as multi-layers of scandates and titanates have been prepared using pulsed laser deposition. Epitaxial films were grown on SrRuO 3 /SrTiO 3 (100) as well as amorphous films on silicon substrates. The epitaxial films are investigated to measure th