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Rapid thermal oxidation of Ge-rich Si[sub 1âx]Ge[sub x] heterolayers

✍ Scribed by Bera, M. K.; Chakraborty, S.; Das, R.; Dalapati, G. K.; Chattopadhyay, S.; Samanta, S. K.; Yoo, W. J.; Chakraborty, A. K.; Butenko, Y.; SÌiller, L.; Hunt, M. R. C.; Saha, S.; Maiti, C. K.

Book ID: 121245415
Publisher: AVS (American Vacuum Society)
Year: 2006
Tongue: English
Weight: 423 KB
Volume: 24
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.2137329

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