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Range of implanted boron, phosphorus, and arsenic in silicon

✍ Scribed by Davies, D. Eirug

Book ID: 120080434
Publisher: NRC Research Press
Year: 1969
Tongue: English
Weight: 189 KB
Volume: 47
Category: Article
ISSN: 0008-4204
DOI: 10.1139/p69-221

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