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Range distributions of MeV implants in silicon II: A comparison of SIMS and spreading resistance profiles of B, P and Ga

✍ Scribed by David C. Ingram; John A. Baker; David A. Walsh; Elizabeth Strathman


Book ID
113278779
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
267 KB
Volume
21
Category
Article
ISSN
0168-583X

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