Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon

✍ Scribed by E. Demenev; D. Giubertoni; M. A. Reading; P. Bailey; T. C. Q. Noakes; M. Bersani; J. A. van den Berg

• Book ID: 112206943
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 909 KB
• Volume: 45
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.5136