Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon

✍ Scribed by E. Demenev; D. Giubertoni; J. van den Berg; M. Reading; M. Bersani

• Book ID: 113823592
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 679 KB
• Volume: 273
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2011.07.073