Random Deposition as a Growth Mode in Atomic Layer Deposition (Chem. Vap. Deposition 2004, 3, 159)

✍ Scribed by R.L. Puurunen

• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 109 KB
• Volume: 11
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200590011