Growth Per Cycle in Atomic Layer Deposition: A Theoretical Model (Chem. Vap. Deposition 2003, 9, 249)

✍ Scribed by R.L. Puurunen

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 45 KB
• Volume: 10
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200490008