Raman study of silicon nanocrystals formed in SiNx films by excimer laser or thermal annealing

✍ Scribed by Volodin, V. A.; Efremov, M. D.; Gritsenko, V. A.; Kochubei, S. A.

• Book ID: 118015792
• Publisher: American Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 380 KB
• Volume: 73
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.122130