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Raman spectra of Si-implanted silicon on sapphire

✍ Scribed by Y. Ohmura; T. Inoue; T. Yoshii


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
268 KB
Volume
37
Category
Article
ISSN
0038-1098

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Optical properties of ion-implanted sili
✍ Ch. Wilbertz; K.L. Bhatia; W. KrΓ€tschmer; S. Kalbitzer πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 584 KB

The Jormation of amorphous zones in thin heteroepitaxial layers" of silicon has been investigated by optical transmission spectroscopy' with ion species, dose, intensity and irradiation temperature as the main parameters. The dependence of the recrystallization of the irradiated layers on annealing