Raman spectra of hard carbon films and hard carbon films containing secondary elements

✍ Scribed by T.J Dines; D Tither; A Dehbi; A Matthews

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 622 KB
• Volume: 29
• Category: Article
• ISSN: 0008-6223
• DOI: 10.1016/0008-6223(91)90073-r

✦ Synopsis

Raman spectroscopy

has been used to investi_gate the structure and bonding in a number ol carbon films prepared by plasma physical vapour deposltion and chemical vapour deposition. Several secondary elements have been introduced into the structure of the coatings to observe their intlucnce on the coating-substrate assembly.

The spectra show that the samples arc composed of disordered carbon which is mainly sp'-bonded.

but with some sp' bonding.

A detailed examination of the IOU wavenumber region of the specra (<I .I00 cm ') has revealed evidence for interaction with the silicon substrate.

There is also evidence for C-H and 5-H bonding.

Key WordsCarbon films, Raman spectroscopy.