Hard carbon and composite metal/hard carbon films prepared by a dc unbalanced planar magnetron

✍ Scribed by H Biederman; K Kohoutek; Z Chmel; V Stary; RP Howson

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 850 KB
• Volume: 40
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)90039-2