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Radiation Hardening of Thermal Oxides on Silicon via Ion Implantation

✍ Scribed by Donovan, R. P.; Simons, M.; Monteith, L. K.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermal oxidation of ion implanted silic

✍ J.S. Williams; C.E. Christodoulides 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 532 KB

The effect of radiation on ion-implanted

✍ M. Campanella; N. Croitoru; F. Groppi; F. Lemeilleur; S. Pensotti; P.G. Rancoita 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 293 KB

Thermal stability of TiSi2 on ion implan

✍ J.F. Chen; L.J. Chen; W. Lur 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 721 KB

MOS Capacitance–Voltage Characteristics

✍ Chandorkar, A. ;Karulkar, V. T. ;Vengurlekar, A. S. ;Ramanathan, K. Y. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 615 KB

Thermal- and radiation-stability of hydr

✍ H.J. Whitlow; J. Keinonen; M. Hautala; A. Hautojärvi 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 567 KB

BF2 ion implantation in silicon through

✍ M.C. Ozturk; J.J. Wortman; W.K. Chu; G. Rozgonyi; D.P. Griffis 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 353 KB