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Radiation-enhanced diffusion of implanted impurities in amorphous Si

โœ Scribed by F. Priolo; J.M. Poate; D.C. Jacobson; J.L. Batstone; S.U. Campisano

Book ID
113280190
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
390 KB
Volume
39
Category
Article
ISSN
0168-583X

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