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Radiation Effects Introduced by X-Ray Lithography in MOS Devices

✍ Scribed by Peckerar, M. C.; Dozier, C. M.; Brown, D. B.; Patterson, D.; McCarthy, D.; Ma, D.

Book ID: 114662474
Publisher: IEEE
Year: 1982
Tongue: English
Weight: 811 KB
Volume: 29
Category: Article
ISSN: 0018-9499
DOI: 10.1109/tns.1982.4336431

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