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Quasistatic evolution of a brittle thin film

✍ Scribed by Jean-François Babadjian


Publisher
Springer
Year
2006
Tongue
English
Weight
567 KB
Volume
26
Category
Article
ISSN
0944-2669

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This paper describes the design and fabrication of a series of test structures for measuring the fracture toughness of brittle thin films, with application to low-pressure chemical-vapor-deposited (LPCVD) Si3N4 and low-stress, silicon-rich LPCVD SixNy. Crack-initiating features are patterned in clam