Quantitative trace analysis by non-resonant laser post-ionization

✍ Scribed by S. Hayashi; Y. Hashiguchi; K. Suzuki; T. Ohtsubo; B. J. McIntosh

• Book ID: 104592806
• Publisher: John Wiley and Sons
• Year: 1991
• Tongue: English
• Weight: 539 KB
• Volume: 17
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740171105

✦ Synopsis

Abstract

In order to overcome the poor quantitativeness of conventional SIMS, sputtered neutral mass spectrometry (SNMS) employing non‐resonant laser post‐resonant laser post‐ionization has been studied. By studied. By combining a time‐of‐flight (TOF) analyzer with a powerful excimer laser, it was confirmed that non‐resonant laser post‐ionization is capable of quantitative analysis of impurities at the pm level. On comparing laser wavelengths, 193 nm (ArF) gave a higher post‐ionization efficiency than 248 nm (KrF). It was also demonstrated that the electronegative element sulphur can be detected as positive ions by post‐ionization. Furthermore, surface metallic contaminants in a small area (250 μm square) could be determined down to 10^11^ atoms cm^−2^.