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Quantitative surface stress measurements using a microcantilever

✍ Scribed by Godin, Michel; Tabard-Cossa, Vincent; GruÌtter, Peter; Williams, Peter

Book ID: 121390121
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 329 KB
Volume: 79
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1387262

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