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Polyimide microcantilever surface stress sensor using low-cost, rapidly-interchangeable, spring-loaded microprobe connections

✍ Scribed by R.H. Ibbotson; R.J. Dunn; V. Djakov; P. Ko Ferrigno; S.E. Huq


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
602 KB
Volume
85
Category
Article
ISSN
0167-9317

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