✦ LIBER ✦
Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification
✍ Scribed by Zhang, Guiming; Zhao, Libo; Jiang, Zhuangde; Yang, Shuming; Zhao, Yulong; Huang, Enze; Wang, Xiaopo; Liu, Zhigang
- Book ID
- 121003186
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 692 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0022-3727
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