Application of low-energy noble-gas ion
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van den Oetelaar, L. C. A.; van Benthem, H. E.; Helwegen, J. H. J. M.; Stapel, P
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Article
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1998
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John Wiley and Sons
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English
β 488 KB
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Low-energy noble-gas ion scattering (LEIS) probes the outermost atomic layer of a material, but a quantitative compositional analysis of this layer is not straightforward. It is demonstrated that quantiΓcation by calibration can be done, assuming that ion fractions and shielding e β ects are the same