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Quantitative electron energy loss spectroscopy of Si nanoclusters embedded in SiOx

✍ Scribed by G. Nicotra; C. Bongiorno; L. Caristia; S. Coffa; C. Spinella

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
333 KB
Volume
84
Category
Article
ISSN
0167-9317

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An investigation has been made into the effect of chromatic aberrations of a pre-spectrometer lens system on quantitative elemental analysis by electron energy loss spectroscopy (EELS). In transmission electron microscopy (TEM) diffraction mode, the measured effects are typically 150-330 times large