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Practical application of quantitative electron energy loss spectroscopy in a stem

✍ Scribed by Börje Lehtinen


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
99 KB
Volume
17
Category
Article
ISSN
0304-3991

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The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolu