Quantitative depth profile and bulk analysis with high dynamic range by electron gas sputtered neutral mass spectrometry

✍ Scribed by Jede, R.

• Book ID: 121735446
• Publisher: AVS (American Vacuum Society)
• Year: 1988
• Tongue: English
• Weight: 866 KB
• Volume: 6
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.575023