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Quantitative analysis of oxygen in thin epitaxial layers of GaAs by SIMS

✍ Scribed by A.M. Huber; G. Morillot; N.T. Linh; J.L. Debrun; M. Valladon


Publisher
Elsevier Science
Year
1978
Weight
235 KB
Volume
149
Category
Article
ISSN
0029-554X

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