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Thermodynamic analysis of the deposition of GaAs epitaxial layers prepared by the MOCVD method

✍ Scribed by Jindřich Leitner; Jan Mikulec; Petr Von̆ka; Josef Stejskal; Rudolf Hladina; Přemysl Klíma

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 619 KB
Volume: 112
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90320-5

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