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Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition

✍ Scribed by Poxson, D. J.; Mont, F. W.; Schubert, M. F.; Kim, J. K.; Schubert, E. F.

Book ID: 120599810
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 527 KB
Volume: 93
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2981690

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