## Abstract The calculation of surface composition form Auger peak heights requires a knowledge of the matrix effects. These are modifications to the yield of Auger electrons arising from inelastic mean free paths, the Auger backscattering factor and sample density effects. A method for approximati
β¦ LIBER β¦
Quantification of Auger depth profiles by means of Rutherford backscattering spectrometry
β Scribed by Hubert Rugy; Philippe Saliot; Roland Pantel
- Book ID
- 112376574
- Publisher
- Springer
- Year
- 1989
- Tongue
- English
- Weight
- 187 KB
- Volume
- 333
- Category
- Article
- ISSN
- 1618-2650
No coin nor oath required. For personal study only.
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Cyclotron Rutherford backscattering spectrometry (CRBS), which utilizes the cyclotron motions of scattered ions in a uniform magnetic field, enables us to perform elemental depth profile measurements with an acceptance angle of larger than 10 msr and a relative energy resolution of better than 1%. C