Pumping of corrosive or hazardous gases with turbomolecular and oilfilled rotary vane backing pumps: K Fischer et al, Vacuum 32 (10/11), 1982, 619–621

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 137 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90407-5