Pumping of corrosive or hazardous gases with turbomolecular and oil-filled rotary vane backing pumps

✍ Scribed by K Fischer; J Henning; K Abbel; H Lotz

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 270 KB
• Volume: 32
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(82)94034-9