4883. Pumping of corrosive or hazardous gases with turbomolecular and oil-filled rotary vane backing pumps: K Fischer et al, J Vac Sci Technol, 18 (3), 1981, 1026–1029

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 176 KB
• Volume: 32
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(82)90025-2