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Pulsed laser deposition of zirconium silicate thin films as candidate gate dielectrics

✍ Scribed by M. Zhu; J. Zhu; J.M. Liu; Z.G. Liu

Publisher: Springer
Year: 2005
Tongue: English
Weight: 600 KB
Volume: 80
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-003-2107-7

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