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Pulsed laser deposition of Nd:YAG on Si with substrate bias voltage

✍ Scribed by Roman Rumianowski; Franciszek Rozpłoch; Roman S Dygdała; Sławomir Kulesza; Przemysław Płóciennik; Andrzej Wojtowicz

Book ID
108417803
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
200 KB
Volume
193
Category
Article
ISSN
0169-4332

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Lead titanate (PbTiO 3 ) thin films were prepared on platinised silicon substrates by pulsed laser deposition. A predominantly (1 1 1) oriented perovskite phase was obtained at a substrate temperature of 530 • C. Deposition at higher substrate temperatures resulted in the formation of a lead deficie