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Pulsed laser deposited ZrAlON films for high-kgate dielectric applications

✍ Scribed by J. Zhu; Z.G. Liu; Y.R. Li

Publisher
Springer
Year
2005
Tongue
English
Weight
650 KB
Volume
81
Category
Article
ISSN
1432-0630

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## Abstract Among spintronic materials, mixed‐valence manganite La ~0.7~Sr~0.3~MnO~3~ (LSMO) is widely investigated due to its half‐metal nature. LSMO thin films were grown by pulsed laser deposition (PLD) onto amorphous silica substrates heated at nearly 600 °C. An ArF excimer laser was chosen to