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Pulse Magnetron Sputtering with high power density – an attempt at a critical evaluation

✍ Scribed by Frach, Peter; Gottfried, Christian; Fietzke, Fred; Klostermann, Heidrun; Bartzsch, Hagen; Glöß, Daniel


Book ID
121457355
Publisher
IOP Publishing
Year
2012
Weight
977 KB
Volume
39
Category
Article
ISSN
1757-8981

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