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Pt–Ru alloy electrode for(Ba,Sr)TiO3capacitor

✍ Scribed by Jong-Ho Yun; Ki-Young Oh

Book ID
110340323
Publisher
Springer US
Year
2002
Tongue
English
Weight
940 KB
Volume
13
Category
Article
ISSN
0957-4522

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## Abstract In this article, the potential feasibility of integrating BST films into Si wafer by adopting tunable interdigital capacitor (IDC) with TiO~2~ thin film buffer layer is suggested. TiO~2~ as buffer layer is grown onto Si substrate by atomic layer deposition and the coplanar IDC on Ba~x~S