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Pt and W ohmic contacts to p-6H-SiC by focused ion beam direct-write deposition

✍ Scribed by A. A. Iliadis; S. N. Andronescu; W. Yang; R. D. Vispute; A. Stanishevsky; J. H. Orloff; R. P. Sharma; T. Venkatesan; M. C. Wood; K. A. Jones

Book ID: 107457825
Publisher: Springer US
Year: 1999
Tongue: English
Weight: 217 KB
Volume: 28
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-999-0002-5

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## Abstract Pt/Ga/C and Pt/C composite nanowires have been fabricated using ion beam induced deposition (IBID) and electron beam induced deposition (EBID), respectively, with a dual beam focused ion beam system. The Pt/Ga/C composite nanowires usually exhibit a semiconducting character and their re