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Direct-write patterning of microstructured porous silicon arrays by focused-ion-beam Pt deposition and metal-assisted electroless etching

✍ Scribed by Chattopadhyay, Soma; Bohn, Paul W.


Book ID
121443883
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
828 KB
Volume
96
Category
Article
ISSN
0021-8979

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