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Proximity effect of electron beam lithography for single-electron transistor fabrication

✍ Scribed by Hu, Shu-Fen; Sung, Chin-Lung; Huang, Kuo-Dong; Wan, Yue-Min


Book ID
118223585
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
497 KB
Volume
85
Category
Article
ISSN
0003-6951

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