Protuberance growth at polysilicon surfaces during oxidation
β Scribed by Soichi Nadahara; Jun-ichi Shiozawa; Keitaro Imai; Kyoichi Suguro; Kikuo Yamabe
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 437 KB
- Volume
- 41-42
- Category
- Article
- ISSN
- 0169-4332
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