✦ LIBER ✦

Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

✍ Scribed by Haney, Steven J. ;Berger, Kurt W. ;Kubiak, Glenn D. ;Rockett, Paul D. ;Hunter, John

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Issues of laser plasma sources for soft

✍ L. Shmaenok; F. Bijkerk; E. Louis; A. van Honk; M.J. van der Wiel; Yu. Platonov; 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 371 KB

Soft x-ray projection lithography using

✍ E. Louis; F. Bijkerk; L. Shmaenok; H.-J. Voorma; M.J. van der Wiel; R. Schlatman 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 458 KB

High-brightness laser plasma soft X-ray

✍ H. Fiedorowicz; A. Bartnik; L. Juha; K. Jungwirth; B. Králiková; J. Krása; P. Ku 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 107 KB

SPIE Proceedings [SPIE International Sym

✍ Hansson, Bjoern A. M.; Rymell, Lars; Berglund, Magnus; Hemberg, Oscar E.; Janin, 📂 Article 📅 2001 🏛 SPIE ⚖ 174 KB