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Properties study of inductively coupled nitrogen plasmas and pressure effects on them

✍ Scribed by K.C. Paul; T. Sakuta

Book ID
108455241
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
247 KB
Volume
56
Category
Article
ISSN
0378-7796

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We designed a low-pressure inductively coupled plasma (LP-ICP) with a laser ablation chamber that was used for solid sample introduction, and we investigated the fundamental characteristics of Ar and He ICPs with the LP-ICP. Fundamental characteristics of Ar and He ICPs at low pressure were studied