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Properties of TiN, ZrN and ZrTiN coatings prepared by cathodic arc evaporation

✍ Scribed by J. Musil; I. Štěpánek; J. Musil Jr.; M. Kolego; O. Bláhová; J. Vyskočil; J. Kasl


Book ID
108026892
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
509 KB
Volume
163
Category
Article
ISSN
0921-5093

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Study of TiN/ZrN/TiN/ZrN multilayers coa
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The TiN/ZrN/TiN/ZrN multilayers were grown through the Plasma Assisted Physic Vapor Deposition (PAPVD) by the pulsed arc technique in a noncommercial system, manufactured in our laboratory. Thin films were deposited on 316 stainless steel substrate with different discharges number (one to five disch