Study of TiN/ZrN/TiN/ZrN multilayers coa
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D. Arias; A. Devia; J. Velez
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Article
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2010
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Elsevier Science
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English
⚖ 859 KB
The TiN/ZrN/TiN/ZrN multilayers were grown through the Plasma Assisted Physic Vapor Deposition (PAPVD) by the pulsed arc technique in a noncommercial system, manufactured in our laboratory. Thin films were deposited on 316 stainless steel substrate with different discharges number (one to five disch