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Properties of TiN films grown by atomic-layer chemical vapor deposition with a modified gaseous-pulse sequence

✍ Scribed by Hsyi-En Cheng; Wen-Jen Lee

Book ID: 113781644
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 546 KB
Volume: 97
Category: Article
ISSN: 0254-0584
DOI: 10.1016/j.matchemphys.2005.08.017

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