๐”– Bobbio Scriptorium
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Properties of superconducting weak links prepared by ion implantation and by electron beam lithography

โœ Scribed by Harris, E.; Laibowitz, R.

Book ID
117923071
Publisher
IEEE
Year
1977
Tongue
English
Weight
1008 KB
Volume
13
Category
Article
ISSN
0018-9464

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TEM sample preparation, VLSI, semiconductor processing, Defect analysis A cross-sectional sample preparation technique is described that relies on lithographic and dry-etching processing, thus avoiding metallographic polishing and ion milling. The method is capable of producing cross-sectional trans