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Properties of spectrally selective NiC films produced by reactive sputtering Part 1. Structural and electrical properties

✍ Scribed by Marten Sikkens

Book ID
104172893
Publisher
Elsevier Science
Year
1982
Weight
672 KB
Volume
6
Category
Article
ISSN
0165-1633

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp